Application solution: Printing OLED screens

In the process of printing OLED screens, gas is used as a carrier material to vaporize organic molecules in the form of red, green and blue structures onto a substrate via a print head. Distance and gap measurements in particular must be carried out precisely. The interferoMETER IMS5400MP-DS makes these measurements possible.

For quality reasons, the distance to the substrate must always remain exactly the same. As the substrate rests on an air table and can therefore fluctuate, its distance to the table is determined by several interferometers. With the multi-peak option, the gap between the substrate and the silicon layer on it can be checked at the same time. The extremely small and vacuum-compatible IMP DS1/VAC sensor is installed directly in the air table and measures from below onto or through the approximately 0.5 mm thick glass. The measured values are transmitted directly via EtherCAT to the machine's controller, where they are used to regulate the compressed air.

Advantages at a glance

Highest accuracy in resolution and linearity
Multi-peak function for simultaneous distance and gap measurement
Tiny sensors with a diameter of just 4 mm

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